Formal Sciences & Matter / Physics

Excimer Laser

Basov, Danilychev and Popov build the first excimer laser (1970); krypton- and argon-fluoride versions give deep-ultraviolet light.

Excimer lasers emit short, powerful ultraviolet pulses at 248 nm (KrF) and 193 nm (ArF). They became the light source of chip lithography and of laser eye surgery.