Researched
EUV Lithography Proof of Concept
NTT's Kinoshita shows EUV imaging with multilayer mirrors in 1986, and in 1997 Intel and US national labs form the EUV LLC to build a machine.
Open in the interactive tree →Hiroo Kinoshita reported the first focused EUV images at a Japanese meeting in 1986. The EUV LLC consortium led by Intel with Lawrence Livermore, Berkeley and Sandia built an engineering test stand and then handed the work over to toolmakers.
Prerequisites
Unlocks
- Tin-Plasma EUV Light Source2009
- EUV Lithography2019Kinoshita's 1986 images and the EUV LLC proved the concept